Q&A

What is FinFET process?

What is FinFET process?

FinFET, also known as Fin Field Effect Transistor, is a type of non-planar or “3D” transistor used in the design of modern processors. This type of multi-gate process extends Moore’s law, allowing semiconductor manufacturers to create CPUs and memory modules that are smaller, perform faster, and consume less energy.

How FinFET reduces leakage current?

FinFET is suitable for future nanoscale memory circuits design due to its reduced short-channel effects (SCEs) and leakage current [6]. This technique provides increased operating speed by low-threshold MOSFET and reduced leakage by high-threshold voltage.

How FinFET is fabricated?

In one common type (n-channel), electrons flow easily from source to drain when a positive voltage is applied to the gate. If the gate-to-source voltage is negative, then the conductive channel is blocked and electron flow in the transistor is switched off. Traditionally, FETs are fabricated directly on silicon wafers.

How can MOSFET leakage current be reduced?

Leakage current can be lowered by an increased gate doping which in turn increases the MOSFET’s threshold voltage. The switching MOSFETs you’re looking at are designed to have a low threshold voltage and are thus more “leaky”.

How does FinFET reduce power consumption?

The lower operating voltage of FinFET devices results in up to 50% dynamic power savings. The advantages can be summarized as better technology parameters that give lower leakage and dynamic power consimption. In planar technologies this was done by changing the width of the device.

How is the source drain profile of FinFET determined?

The final shape of the source-drain profile is determined by the sum of growth in every direction, meaning that the silicon germanium structure (purple) increases in size as the SiGe thickness increases. Calculated resistance values are based on the various epitaxial-generated shapes, as shown in Figure 3.

What does 0gate voltage drain current in FinFET mean?

0GATE VOLTAGE DRAIN CURRENT L eff •“N‐channel” & “P‐channel” MOSFETs  operate in a complementary manner “CMOS” = Complementary MOS Source Body Drain 5 CMOS Devices and Circuits

Why is a fin field effect transistor called a FinFET?

FinFET. A Fin Field-effect transistor ( FinFET) is a MOSFET built on a substrate where the gate is placed on two, three, or four sides of the channel or wrapped around the channel, forming a double gate structure. These devices have been given the generic name “finfets” because the source/drain region forms fins on the silicon surface.

What should I know about advanced FinFET process technology?

1. Introduction 2. Advanced FinFET Process Technology 3. Summary •Merits and Issues of FinFET •Vth Tuning •Vth Variation Contents 2 National Institute of Advanced Industrial Science and Technology